Introduction of New Instrument


This instrument permits determination of spectral
transmittance and reflectance (at incident angle
of 5degrees) of sample at UV and Vis-NIR region
from 240nm to 2600nm.
Light sources are WI lamp and Deuterium lamp, and
detectors are integrating sphere, photomultiplier
tube, and PbS. Combination of them is controlled
automatically depending on wavelength of light.
Line width of diagnostic light is adjustable by
changing width of exit slit of monochromator
inside this instrument from 0.1nm to 8.0 nm.
This instrument also permits alteration of
transmittance or reflectance from moment to moment.
Optional equipment permits determination of
spectral reflection at arbitrary point on 8-inch
wafer at incident angle of 5degrees. Ultra
broadband dielectric mirror as reference permits
determination of absolute reflectance from 400nm
to 1200nm.
Using polarizer permits polarization-dependent
transmittance and reflectance from 400nm to 700nm.
Measured data are recorded as ASCII data, and user
takes them directly from desktop computer by USB
flash memory. Operating system of computer is
Windows XP, and don’t introduce a virus into
computer by your USB flash memory, please.


Spectral transmittance of optical filter
Spectral reflectance of optical mirror
Spectral transmittance of liquid sample
Spectral reflectance at any point of 8-inch wafer
Spectral transmittance or reflectance of dispersed
Spectral transmittance or reflectance of
multilayered sample
Polarization-dependent measurement of the above



Oblique-incident transmittance can be measured by
adjusting installation configuration of sample.
Diagnostic beam section is 10mm tall and 5mm wide
at entrance of integrating sphere.
Sample chamber is spacious for optional equipment,
and a variety of application measurements could be
done by installing specialized equipments from users.